虚拟光刻 (Virtual Lithography)

RDA 光刻胶显影分析仪 (Photoresist Development Analysis Instrument)

测量及分析光刻胶排气 (PR Outgas Measusing & Analysis)

曝光系統 (Exposure System)

PAGA-100 光至产酸剂去保护团反应分析仪 (PAGA-100 PAG Deprotection Reaction Analyzer)

树脂品质检定 (Resin Quality Inspection)

3合1 涂布/烘烤/显影 光刻胶小型实驗室 (3 in 1 Spincoat/Baking/Developing Robot unit. for Photorestist R&D)

半自动均胶及烘烤设备 (Semi-automated Spin Coatet & Bake Plate System)

视频

专家论述

曝光系統
Exposure System